Clean room  洁净室  无尘室

Dry coil units干盘管

Air handling unit  空调箱

Fan filter units风扇过滤网组

High efficiency particulate sir filters高效过滤网

ultra low penetration air filter超高空气效过滤器

recycle air cabinet  unit  schedule循环组合空调单元

air shower风淋室

pass box传递箱

clean bench净化工作台

relief damper泄压风门

fan coil unit风机盘管

clean dry air压缩空气

vacuum真空

heat exchangers 换热器